Litcius/Paper detail

Hot embossing of microfluidics in cyclic-olefin co-polymer using a wafer aligner-bonder

M. Salman Asif, R. Niall Tait, Pierre Berini

2021Microsystem Technologies13 citationsDOI

Topics & Concepts

MicrofluidicsEmbossingWaferMaterials scienceMoldWafer-level packagingFabricationNanotechnologyComposite materialAlternative medicineMedicinePathologyNanofabrication and Lithography TechniquesAdvanced Surface Polishing TechniquesMicrofluidic and Capillary Electrophoresis Applications
Hot embossing of microfluidics in cyclic-olefin co-polymer using a wafer aligner-bonder | Litcius