Modeling of sputter-based atomic layer deposition with altered parameters
A. S. Bhattacharyya
Topics & Concepts
SputteringMaterials scienceAtomic layer depositionAnataseTinSputter depositionDeposition (geology)Analytical Chemistry (journal)ArgonLayer (electronics)Thin filmAtomic physicsComposite materialNanotechnologyMetallurgyChemistryBiologySedimentChromatographyPhysicsPaleontologyPhotocatalysisBiochemistryCatalysisMetal and Thin Film MechanicsSemiconductor materials and devicesCatalytic Processes in Materials Science