Development of MEMS gas sensors equipped with metal organic frameworks
Mehdi Ghommem, Mohamed Hemid, Basil Alattar, Rana Sabouni, Alaaeldin Elhady, Yasser S. Shama, M. Arabi, Eihab Abdel‐Rahman
Topics & Concepts
Microelectromechanical systemsDetectorSensitivity (control systems)CantileverMaterials scienceResonatorSIGNAL (programming language)Current (fluid)OptoelectronicsNanotechnologyAcousticsElectronic engineeringComputer scienceElectrical engineeringPhysicsEngineeringTelecommunicationsComposite materialProgramming languageGas Sensing Nanomaterials and SensorsMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies