Improvement of Ti/Al ohmic contacts on N-face n-type GaN by using O2 plasma treatment
Hyeuk Seo, Yu‐Jung Cha, Abu Bashar Mohammad Hamidul Islam, Joon Seop Kwak
Topics & Concepts
Ohmic contactMaterials scienceX-ray photoelectron spectroscopyPlasmaContact resistanceLight-emitting diodePhotolithographyOptoelectronicsPlasma cleaningAnalytical Chemistry (journal)Layer (electronics)ChemistryNanotechnologyChemical engineeringPhysicsEngineeringQuantum mechanicsChromatographyGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsGa2O3 and related materials