Surface profile measurement of transparent parallel plates by multi-scale analysis phase-shifting interferometry (MAPSI)
Yifan Ding, Qi Lü, Shijie Liu, Xu Zhang, Dapeng Chen, Jianda Shao
Topics & Concepts
InterferometryOpticsPhase (matter)Scale (ratio)Surface (topology)Materials scienceComputer sciencePhysicsGeometryQuantum mechanicsMathematicsOptical measurement and interference techniquesSurface Roughness and Optical MeasurementsAdvanced Measurement and Metrology Techniques