Highly efficient finishing of large-sized single crystal diamond substrates by combining nanosecond pulsed laser trimming and plasma-assisted polishing
Nian Liu, Kentaro Sugimoto, Naoya Yoshitaka, Hideaki Yamada, Rongyan Sun, Kenta Arima, Kazuya Yamamura
Topics & Concepts
Materials scienceDiamondSurface roughnessPolishingLaserTrimmingSubstrate (aquarium)GraphiteLaser ablationComposite materialOptoelectronicsOpticsOperating systemOceanographyPhysicsComputer scienceGeologyDiamond and Carbon-based Materials ResearchLaser-induced spectroscopy and plasmaAdvanced Surface Polishing Techniques