Application of an ozone-activated peroxymonosulfate process to effectively degrade tetramethylammonium hydroxide (TMAH) in semiconductor wastewater
Hyunki Jung, Duksoo Jang, Jiyeon Jung, Changha Lee, Am Jang
Topics & Concepts
Tetramethylammonium hydroxideWastewaterOzoneChemistryTetramethylammoniumProcess (computing)HydroxideEnvironmental chemistrySemiconductorPhotocatalysisPulp and paper industryChemical engineeringEnvironmental scienceInorganic chemistryEnvironmental engineeringMaterials scienceOrganic chemistryCatalysisOptoelectronicsComputer scienceEngineeringOperating systemIonAdvanced oxidation water treatmentWater Quality Monitoring and AnalysisWater Treatment and Disinfection