Effects of sputtering parameters and annealing temperatures on magnetic properties of CoFeB films
Zhangliang Xu, Lei Qin
Topics & Concepts
Materials scienceAnnealing (glass)SputteringAmorphous solidCoercivitySputter depositionCrystallizationThin filmAnalytical Chemistry (journal)Nuclear magnetic resonanceComposite materialCondensed matter physicsNanotechnologyCrystallographyChemical engineeringEngineeringChemistryPhysicsChromatographyMagnetic properties of thin filmsMetallic Glasses and Amorphous AlloysMagnetic Properties and Applications