Effects of surface texturing on nanotribological properties and subsurface damage of monocrystalline GaN subjected to scratching investigated using molecular dynamics simulation
Jian Guo, Jingjing Chen, Yunzhi Lin, Zemeng Liu, Yongqiang Wang
Topics & Concepts
Materials scienceComposite materialMonocrystalline siliconDislocationNanoscopic scalePenetration depthMolecular dynamicsGallium nitrideNanotechnologyMetallurgyLayer (electronics)OpticsSiliconComputational chemistryPhysicsChemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and Applications