Quantitative analysis of performance degradation in movable MEMS devices by a multiscale approach
Jiaxing Cheng, Xuanyi Chen, Zhaoxia Li, Junxi Lu, Bangjian Liu
Topics & Concepts
Microelectromechanical systemsDegradation (telecommunications)Materials scienceStructural engineeringComputer scienceEngineeringElectronic engineeringNanotechnologyAdvanced MEMS and NEMS TechnologiesForce Microscopy Techniques and ApplicationsAcoustic Wave Resonator Technologies