Al2O3-ZnO atomic layer deposited nanolaminates for improving mechanical and corrosion properties of sputtered CrN coatings
Elias Kaady, Akram Alhussein, Mikhaël Bechelany, Roland Habchi
Topics & Concepts
CorrosionMaterials scienceAtomic layer depositionNanoindentationPhysical vapor depositionCoatingLayer (electronics)MetallurgyChromium nitrideThin filmChemical vapor depositionComposite materialNanotechnologyNitrideMetal and Thin Film MechanicsSemiconductor materials and devicesDiamond and Carbon-based Materials Research