Evolution of microstructure of IGZO ceramic target during magnetron sputtering
Shuhan Liu, Jie Chen, Benshuang Sun, Zhiyuan Huai, Fudi Xiong, Jilin He
Topics & Concepts
SputteringMaterials scienceMicrostructureCeramicSputter depositionMetallurgyOptoelectronicsNanotechnologyThin filmZnO doping and propertiesThin-Film Transistor TechnologiesSemiconductor materials and devices