RF micro-electro-mechanical system (MEMS) capacitive switch performance parameters and improvement strategies
Kurmendra Kurmendra, Rajesh Kumar
Topics & Concepts
Materials scienceCapacitanceCapacitive sensingMicroelectromechanical systemsDielectricStictionOptoelectronicsCapacitorVoltageElectrical engineeringElectrodeEngineeringChemistryPhysical chemistryAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesMechanical and Optical Resonators