Improved heteroepitaxy of κ-Ga2O3 on c-plane sapphire by initial mist flow stabilization during mist chemical vapor deposition
Baran Demir, Rebecca L. Peterson
Topics & Concepts
MistMaterials scienceSapphireChemical vapor depositionEpitaxyOhmic contactCrystal (programming language)Thin filmGalliumBand gapOptoelectronicsAnalytical Chemistry (journal)ChemistryOpticsNanotechnologyMetallurgyLayer (electronics)LaserProgramming languageChromatographyMeteorologyPhysicsComputer scienceGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques