Aerosol deposition of alumina films on microstructured silicon substrates
Yasuhito Matsubayashi, Jun Akedo
Topics & Concepts
Materials scienceMicrostructureSubstrate (aquarium)Deposition (geology)CeramicSiliconComposite materialLaser linewidthResidual stressGrain sizeCoatingThin filmMetallurgyChemical engineeringNanotechnologyOpticsLaserEngineeringSedimentGeologyPaleontologyBiologyPhysicsOceanographySurface Modification and SuperhydrophobicityAdvanced ceramic materials synthesisHigh-Temperature Coating Behaviors