An MDP-based lifter assignment algorithm for inter-floor transportation in semiconductor fabrication
Kyohong Shin, H. Jang, Haejoong Kim
Topics & Concepts
Semiconductor device fabricationRobustness (evolution)Curse of dimensionalityBenchmark (surveying)Wafer fabricationSensitivity (control systems)Markov decision processComputer scienceEngineeringAnalytic hierarchy processAlgorithmMathematical optimizationMarkov processIndustrial engineeringWaferOperations researchMachine learningMathematicsGeodesyChemistryElectrical engineeringGeographyElectronic engineeringStatisticsGeneBiochemistryAdvanced Manufacturing and Logistics OptimizationScheduling and Optimization AlgorithmsAssembly Line Balancing Optimization