Experimental study on single crystal diamond CMP based on Fenton reaction and analysis of oxidation mechanism
Ziyuan Luo, Jiabin Lu, Jun Zeng, Xinhan Wang, Qiusheng Yan
Topics & Concepts
Materials scienceDiamondMechanism (biology)Reaction mechanismChemical engineeringSingle crystalMetallurgyCrystallographyOrganic chemistryCatalysisChemistryEngineeringEpistemologyPhilosophyDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesAdvanced materials and composites