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Comprehensive review of low pull-in voltage RF NEMS switches

Rekha Chaudhary, Prasantha R. Mudimela

2022Microsystem Technologies11 citationsDOI

Topics & Concepts

Nanoelectromechanical systemsMaterials scienceBeam (structure)VoltageGrapheneOptoelectronicsLow voltageDielectricWork (physics)Electrical engineeringNanotechnologyMechanical engineeringEngineeringStructural engineeringNanomedicineNanoparticleAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsNanowire Synthesis and Applications
Comprehensive review of low pull-in voltage RF NEMS switches | Litcius