Tantalum-doped tin oxide films as an effective diffusion barrier for copper metallization of silicon heterojunction solar cells
Kaiyu Chen, Zifeng Yuan, Xuelin Yue, Dong Yi, Yuepeng Li, Jialong He, Zhu Ma, Weiyan Wang, Yu Hu, Yaqin Xie, Wenzhu Liu, Jian Yu
Topics & Concepts
HeterojunctionMaterials scienceDiffusion barrierDopingSiliconCopperTinTin oxideDiffusionTantalumSolar cellBarrier layerOptoelectronicsOxideLayer (electronics)NanotechnologyMetallurgyThermodynamicsPhysicsSilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesSemiconductor materials and interfaces