Batch microfabrication of highly integrated silicon-based electrochemical sensor and performance evaluation via nitrite water contaminant determination
Jiawen Yin, Wanlei Gao, Zan Zhang, Yuliang Mai, Anbo Luan, Han Jin, Jiawen Jian, Qinghui Jin
Topics & Concepts
MicrofabricationNitriteElectrochemistryElectrochemical gas sensorSiliconNanotechnologyChemistryMaterials scienceFabricationNitrateMetallurgyElectrodeOrganic chemistryMedicinePhysical chemistryPathologyAlternative medicineAnalytical Chemistry and SensorsWater Quality Monitoring and AnalysisElectrochemical Analysis and Applications