Feedback control of thin film PZT MEMS actuator with integrated buried piezoresistors
Andrea Vergara, Takashiro Tsukamoto, Weileun Fang, Shuji Tanaka
Topics & Concepts
Microelectromechanical systemsActuatorPID controllerMaterials sciencePhase-locked loopFabricationNoise (video)AmplitudeStability (learning theory)Control theory (sociology)Automatic gain controlOptoelectronicsPhase noiseComputer scienceElectronic engineeringEngineeringTemperature controlControl (management)Control engineeringElectrical engineeringCMOSPhysicsOpticsAmplifierMachine learningPathologyMedicineArtificial intelligenceAlternative medicineImage (mathematics)Advanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesFerroelectric and Piezoelectric Materials